During the installation of Sitecore 10.0.1 XP1 (Single Developer) OnPrem, I experienced the above-mentioned error: “Failed to start service Sitecore Marketing Automation Engine”
The installation script (XP1-SingleDeveloper.ps1) stucks when trying to start the Sitecore Marketing Automation Engine service.
Even starting the service manually or request the MA server role via browser, the MA Engine always crashing on start.
After several tests and with Sitecore Support help, we found which these types of errors happen due to System.AccessViolationException exception which is thrown on license check.
This issue is caused by a profiling tool that is running on the server. In our case, Microsoft Monitoring Agent was the cause of the problem.
After removal, the installation scripts run perfectly!